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2.1 principle of capacitive pressure sensor
Ceramic capacitive pressure sensor uses ceramic diaphragm as pressure-sensitive element. Ceramic diaphragm and ceramic matrix are made into two poles of capacitance respectively. When the external pressure acts on the ceramic diaphragm, the ceramic diaphragm deforms and the distance between the two poles changes, resulting in the change of capacitance. Then the standard voltage signal is output through a specific ASIC conditioning chip.
2.2 structure of capacitive pressure sensor
Ceramic capacitor technology mainly includes ceramic matrix and ceramic diaphragm in structure. Ceramic diaphragm and ceramic matrix are sintered together with high-temperature molten glass to play a sealing role. The ceramic substrate and the inner side of the ceramic diaphragm are printed with electrode patterns to form a variable capacitor. When the measured external pressure is transmitted to the ceramic diaphragm through a special channel, the capacitance between the ceramic substrate and the ceramic diaphragm will change with the change of pressure. A specific ASIC conditioning chip converts the measured capacitance signal into a voltage signal through a set conversion equation.
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